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Skip Navigation LinksFEI Quanta 3D FEG dual-beam SEM FIB

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Instrument Description​

The FEI Quanta 3D FEG dual beam instruments consist of a high-resolution field emission scanning electron microscopy (SEM) column optimized for high brightness and high current, and a high-current focused ion beam (FIB) column with a liquid gallium metal ion source. The microscopes are equipped with Omniprobe micromanipulators for in-situ sample lift-out and a gas injector system for platinum and carbon deposition. The EML system has the EDAX Trident system installed including energy- and wavelength-dispersive spectrometers (EDS, WDS) and electron backscatter diffractometer (EBSD).

 

Applications​

The main uses for these instruments are microstructural and elemental characterization as well as site-specific transmission electron microscopy and atom probe tomography sample preparation from nuclear fuel, cladding and structural materials. These instruments are also used for performing 3-D microstructural and elemental characterization (tomography).


Specifications​

​Resolution electron beam: In high-vacuum mode (also capable of low-vacuum mode operation)​1.2 nm at 30 kV
2.9 nm at 1 kV
​Resolution ion beam:​7 nm at 30 kV
​SEM optics:​High-resolution field emission SEM
Acceleration: accelerating voltage is adjustable from 200 V to 30 kV
Probe current: up to 200 nA, continuously adjustable
Magnification 30 x–1.28 Mx
​FIB optics:​High-current ion column with Ga liquid metal ion source
Magnification 40 x – 1.28 Mx
​Detectors:​Everhardt-Thornley SED (ETD)
Secondary electron and secondary ion detector (CDEM)
IR camera for viewing sample/column
Electron or ion beam current measurement
​Stage:​X, Y, Z, R and T 5 axes mechanical stage
Eucentric and analytical WD: 10 mm 
​Gas injector system:​Gases: platinum, carbon
​Sample manipulator:​Omni Autoprobe 200, no motorized rotation

​Analytical suite:

​EDAX Trident system including EDS, WDS and EBSD


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