The FEI Quanta 3D FEG dual beam instruments consist of a high-resolution field emission scanning electron microscopy (SEM) column optimized for high brightness and high current, and a high-current focused ion beam (FIB) column with a liquid gallium metal ion source. The microscopes are equipped with Omniprobe micromanipulators for in-situ sample lift-out and a gas injector system for platinum and carbon deposition. The EML system has the EDAX Trident system installed including energy- and wavelength-dispersive spectrometers (EDS, WDS) and electron backscatter diffractometer (EBSD).
The main uses for these instruments are microstructural and elemental characterization as well as site-specific transmission electron microscopy and atom probe tomography sample preparation from nuclear fuel, cladding and structural materials. These instruments are also used for performing 3-D microstructural and elemental characterization (tomography).
EDAX Trident system including EDS, WDS and EBSD