Titan Themis 200 is a state-of-the-art, 80-200 kV X-FEG scanning transmission electron microscope (STEM). The microscope has a point resolution of 0.24 nm and STEM resolution of 0.16 nm. It is equipped with a super-X energy-dispersive X-ray spectroscopy (EDX) system, which provides superior sensitivity and fast-speed EDX analysis and EDX mapping down to the atomic scale. The energy resolution is specified to <136 eV @ MnKα for 10 kcps (output counts) at zero-degree sample tilt. The on-axis bright-field/dark-field STEM detector is composed of a bright-field detector and two dark-field detectors. All detectors are silicon solid-state detectors, and can support a beam current up to 3 nA. The Ceta 16M is FEI's latest 16-megapixel digital camera designed for imaging and diffraction applications.
Major application for this instrument includes near-atomic resolution defect structural and chemical analysis. High-speed and high-resolution elemental mapping can be done in a few minutes. Nano beam analysis with high brightness allows for efficient characterization of radiation-induced microstructural features. The wide pole piece gap is designed for experiments requiring high tilt angles like 3-D TEM tomography.
Acquisition speeds (fps = frames per second):
4k x 4k: 1 fps
2k x 2k: 8 fps
1k x 1k: 18 fps
512 x 512: 25 fps
The microscope is also equipped with CompuStage single-tilt holder, high-visibility, low-background double-tilt holder, and high field-of-view single-tilt tomography holder for multiple applications.